lich_dc
第3楼2011/02/23
冷场成功案例:
Hitachi S4700: Spansion, Sunnyvale, California, USA
Improved resolution was observed, on a 5 year old instrument so that sputtered PT grains could be imaged at 5kV and < 3 nm resolution. The user says that the Evactron De-Contaminator is the only accessory one can buy for the SEM that will improve the performance of the instrument.
Hitachi S-4700: NIST Gaithersburg, Maryland, USA
NIST borrowed and later purchased an Evactron D-C for controlling contamination in an Hitachi S-4700 SEM. Their research on contamination control resulted in the paper "Active Monitoring and Control of Electron Beam Induced Contamination" Proc. SPIE Vol. 4344 (2001), 835, by András E. Vladár, Michael T. Postek and Ronald Vane. This study found that the Evactron device was "effective in cleaning the vacuum of the specimen chamber of laboratory and production metrology SEMs."
Hitachi S-4700: Oak Ridge National Laboratory, High Temperature Materials Lab, Oak Ridge, Tennessee, USA
Roughing pump oil backstreaming through the sample exchange chamber was causing dirty specimens and chamber contamination that could not be controlled with a liquid nitrogen (LN) cold finger. Contamination is controlled by use of both the plasma cleaning and the nitrogen purge features of an automatic Evactron system.
Hitachi S-4700: University of Illinois, Champaign-Urbana, Illinois, USA
A three year old Hitachi S-4700 SEM had constant contamination problems since being installed. The user had added a turbomolecular pump and heated micromaze foreline trap, but they made little difference. LN traps, top and bottom, had been kept in service constantly, but failed to stop contamination problems.
lich_dc
第12楼2011/02/24
很方便的, 就像探测器一样直接长期固定在电镜上的,然后客户可以根据自己实际情况进行操作清洁, 比如周五下班了,然后把她打开,然后周一或者周末一关就行, 有些客户也可以晚上开白天关, 轻轻松松消除污染而且没有任何负面影响产生,也不需要耗材因为她直接是吸取实验室气体然后转换的。(保证实验室干净就可以了)。
也可以用于多台电镜不过电镜chamber型号要相同然后不嫌麻烦来回换来换去就可以了。
可以说是安装方便(就几个螺丝上紧),操作方便(开,关),无需维护和耗材,效果显著。