Configuration: - Source : W or LaB6 - System from Matsushita Malaysia - Stage : 50mm 5 Axis - SE detector - EDAX EDS System - Software WinNT (can support LAN & UBS ports available) - Pumps – Mechanical + Oil Diffusion Pump (ODP) + Ion Getter Pump (IGP) Specifications: • Resolution: 3.5nm @ 30kV; 30nm @ 1kV • Tungsten gun system with 6 position auto-bias • Emission current: 0 – 200uA • High voltage range 0.2 – 30kV, continuous • Beam Current: 0.4pA – 4uA max, continuously variable
• Conical final lens • Auto focus and auto stig • ET type SED detector • CCD Chamberscope Stage & Specimen Handling: • Drawer type door • 5 axis stage • X= 50mm / Y = 50mm • Z = 10mm internal, 25mm external • R = 360 degrees continuous • Tilt = -10 to +90 degrees • 35 degree EDX port
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