infocyb
第3楼2008/01/23
Many signals exit the sample as a result of the incident electron beam interacting with the material. These include backscattered electrons, econdary electrons, Xrays, uger electrons, athodoluminescence, ect transmitted lectrons if thin enough.
Electrons that form secondary electron images are of very low energy, typically 50eV, and therefore have only sufficient energy to escape from only a very thin surface layer of less than 10nm depth where the beam has not yet spread significantly in the lateral direction. As a result, the spatial resolution of secondary electron images is greater than Xray analysis.
Higher energy backscattered electrons escape from greater depths and hence these images are poorer in spatial resolution than secondary electron images. In addition, X-rays can continue to be generated by the primary beam and, being able to travel farther in matter than electrons, escape from still deeper from within the sample.
huangtao0307
第5楼2008/08/20
這個講的不錯.挺請楚的
huangtao0307
第6楼2008/08/20
這個講的不錯.挺請楚的