arr163
第3楼2011/06/15
系统提示分析室的真空泄漏,但是我没有更换检测器,只是完全关机而已哦!原文如下:A turbo failure interlock has occurred. this means that the turbo pump has reported a failure condition. the most likely cause for this is a leak on the vacuum system. you should check the following:
have you recently opened the vacuum chamber lid ,for example to replace the retector? if so switch to shutdown mode and open the lid, check that the o-ring seal around the top surface of the vacuum chamber is seated correctly.
领导解决了这个问题,不过,当时我不在旁边,没看见他是怎么处理的?很遗憾,听他说,把分析室打开,检查O形圈,因为长时间没有真空,O形圈会翘起来,导致分析室泄漏的情况,如果有高手遇到过这个问题,进来讲讲您当时的情况哦!