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Model 212 型大面积光罩校准器是一种经济高效的高性能光罩校准器，它采用 OAI 业经验证的组件进行设计，这些组件使 OAI 成为光罩
校准器行业的领导者。
Model 212 型是台式光罩校准器，只需最小的洁净室空间，并且只需最小的洁净室空间，并且为大面积基板、液晶显示器、薄膜
晶体管、面板级封装和OLED。
Model 212大面积掩膜对准器采用了OAI 紫外光源，可提供近紫外、中紫外或深紫外准直紫外光。
灯管提供近紫外、中紫外或深紫外准直紫外光，功率从 200 瓦到 2000 瓦不等。
恒定强度控制器相连，以控制曝光强度控制在所需强度的 ±2% 范围内。
Model 212系统参数:
Substrate Size Substrate Stage | X, Y Travel Z Travel | Up to 12” square or 300mm ±10mm 5mm |
Micrometer | .001”; .0001” | |
Graduations | or .01mm; .001mm | |
Rotation | ±3.5˚ | |
Mask | Size | Up to 14” x 14” |
Lightsource | Beam Size | Up to 12” square |
Lamp Power | 200, 350, 500, 1,000, and | |
2,000 Watt NUV | ||
500, 1,000 and 2,000 Watt DUV | ||
Shutter Timer | Timer | 0.1 to 99.0 sec. at 0.1 second increments |
or 1.0 to 999 sec. at 1.0 second increments | ||
Facilities | Electrical | 110 or 220 vac |
(or other according to Power Supply requirements | ||
and Country) | ||
Vacuum | 20 - 28” Hg. | |
Air and N2 Exhaust | CDA at 60 PSI and N2at 20 PSI 0.35” to 0.5” Water | |
Dimensions | Height | 42” (1067mm) |
Width | 60” (1524mm) | |
Depth | 53” (1346mm) |
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