medodo
第6楼2010/02/18
用共工提供的资料baidu了一下
The Everhart-Thornley Detector (E-T detector or ET detector) is a secondary electron detector used in scanning electron microscopes (SEMs). It is named after its designers, Thomas E. Everhart and Richard F. M. Thornley who in 1960 published their design to increase the efficiency of existing secondary electron detectors by adding a light pipe to carry the photon signal from the scintillator inside the evacuated specimen chamber of the SEM to the photomultiplier outside the chamber. [1] Prior to this Everhart had improved a design for a secondary electron detection by Vladimir Zworykin and J. A. Rajchman by changing the electron multiplier to a photomultiplier. The Everhart-Thornley Detector with its lightguide and highly efficient photomultiplier is the most frequently used detector in SEMs.