光学显微镜 Optical microscope | 电子显微镜 Electronic microscope (TEM) | |
照明束Illumination beam | 可见光 Visible light | 电子束 Electron beam |
波长Wavelength | 390nm-760nm | λ=(150/U)1/2 e.g. U =100kv, λ=0.0037nm |
透镜的分辨率Resolution | 由衍射,埃利园斑决定 diffraction, the Airy spot size RO=(0.61/n sin θ)M 分辨Resolution △ro=0.61/(n sin θ) △ro=(1/2)λ | 1、衍射, 埃利园斑 diffraction, the Airy spot size RO=(0.61/n sin θ)M 2、球差Spherical aberration CS 分辨Resolution △ro=0.49CS1/4λ3/4 |
最好分辨The best resolution | 200nm | 0.1nm (300kv) |
放大倍数Magnification | 1000~1500 | 几十万倍 ×600K |
透镜Lens | 光学透镜Optical Lenses | 电磁透镜Electric and Magnetic Lenses |
条件Condition | 大气Atmosphere | 真空Vacuum |